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| 005 | 20251203090602.0 | ||
| 006 | m q d | ||
| 007 | cr nn 008maaau | ||
| 008 | 090204s2007 mau q j eng d | ||
| 020 | _a9780387261324 (electronic bk.) | ||
| 020 | _a9780387258744 (paper) | ||
| 035 | _a(Springer)978-0-387-25874-4 | ||
| 039 | 9 |
_a200902042122 _bmuhaimin _y04-07-2008 _zmuhaimin |
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| 090 |
_aTK7836 _b.J13 2007 |
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| 100 | 1 | _aJackson, Mark J. | |
| 245 | 1 | 0 |
_aMicro and Nanomanufacturing _h[electronic resource] / _cby Mark J. Jackson. |
| 260 |
_aBoston, MA : _bSpringer Science+Business Media, LLC, _c2007. |
||
| 300 |
_ax, 699 p. : _bill., digital ; _c24 cm. |
||
| 650 | 0 | _aMicrofabrication. | |
| 650 | 0 | _aNanotechnology. | |
| 650 | 1 | 4 | _aEngineering. |
| 650 | 2 | 4 | _aMechanical Engineering. |
| 650 | 2 | 4 | _aElectronics and Microelectronics, Instrumentation. |
| 650 | 2 | 4 | _aManufacturing, Machines, Tools. |
| 710 | 2 | _aSpringerLink (Online service). | |
| 773 | 0 | _tSpringer e-books | |
| 856 | 4 | 0 | _uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/b136902 |
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_a.b1416596x _b2021-06-25 _c2019-11-12 |
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| 914 | _avtls003374254 | ||
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_n0 _kTK7836 .J13 2007 _2lcc |
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