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| 020 | _a9783540695622 (electronic bk.) | ||
| 035 | _a(Springer)978-3-540-69561-5 | ||
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_aCMOS Hotplate Chemical Microsensors _h[electronic resource] / _cby Markus Graf ... [et al.]. |
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_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2007. |
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_axii, 125 p. : _bill. (some col.), digital ; _c24 cm. |
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_aMicrotechnology and MEMS, _x1615-8326 |
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_aMicroelectromechanical systems _xDesign and construction. |
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| 650 | 0 | _aMicrofabrication. | |
| 700 | 1 | _aGraf, Markus. | |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer e-books | |
| 856 | 4 | 0 | _uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/978-3-540-69562-2 |
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