000			01553nam a22003855a 4500
005			20250930124031.0
006			m d
007			cr nn 008maaau
008			090204s2007 gw q j eng d
020			_a9783540346135 (electronic bk.)
020			_a9783540346128 (paper)
035			_a(Springer)978-3-540-34612-8
039		9	_a200902041857 _bmuhaimin _y04-04-2008 _zmuhaimin
050	0	0	_aTK7875 _b.B43 2007
082	0	0	_a621.381 _222
090			_aTK7875 _b.B392 2007
100	1		_aBechtold, Tamara.
245	1	0	_aFast Simulation of Electro-Thermal MEMS _h[electronic resource] : _bEfficient Dynamic Compact Models / _cby Tamara Bechtold, Evgenii B. Rudnyi, Jan G. Korvink.
260			_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2007.
300			_a1online resource (xi, 180 p.) : _bill. (some col.), digital ; _c24 cm.
650		0	_aMicroelectromechanical systems _xMathematical models.
650	1	4	_aEngineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
700	1		_aRudnyi, Evgenii B.
700	1		_aKorvink, J. G. _q(Jan G.) _954556
710	2		_aSpringerLink (Online service)
773	0		_tSpringer e-books
856	4	0	_uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/978-3-540-34613-5
907			_a.b14154857 _b2025-03-20 _c2019-11-12
942			_n0 _kTK7875 .B392 2007
914			_avtls003373097
998			_ae _b2008-04-04 _cm _dz _feng _ggw _y0 _z.b14154857
999			_c411464 _d411464