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020 _a9781846285592 (electronic bk.)
020 _a9781846285585 (paper)
035 _a(Springer)978-1-84628-558-5
039 9 _a200902041857
_bmuhaimin
_y04-04-2008
_zmuhaimin
050 0 0 _aTS176
_b.I555 2007
082 0 0 _a620.0045
_222
090 _aTS176
_b.I61 2007
111 2 _aInternational Conference on Precision Engineering
_n(11th :
_d2006 :
_cTokyo, Japan)
245 1 0 _aTowards Synthesis of Micro-/Nano-systems
_h[electronic resource] :
_bThe 11th International Conference on Precision Engineering (ICPE) August 16-18, 2006, Tokyo, Japan /
_cby Fumihiko Kimura, Kenichiro Horio.
260 _aLondon :
_bSpringer-Verlag London Limited,
_c2007.
300 _axiii, 356 p. :
_bill., digital ;
_c31 cm.
650 0 _aProduction engineering
_vCongresses.
650 0 _aMicrotechnology
_vCongresses.
650 0 _aNanotechnology
_vCongresses.
650 1 4 _aEngineering.
650 2 4 _aNanotechnology.
650 2 4 _aControl Engineering.
650 2 4 _aIndustrial and Production Engineering.
650 2 4 _aManufacturing, Machines, Tools.
650 2 4 _aOperating Procedures, Materials Treatment.
650 2 4 _aComputer-Aided Engineering (CAD, CAE) and Design.
700 1 _aKimura, Fumihiko.
700 1 _aHorio, Kenichiro.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer e-books
856 4 0 _uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/1-84628-559-3
907 _a.b14154754
_b2024-01-26
_c2019-11-12
942 _n0
_kTS176 .I61 2007
914 _avtls003373086
998 _ae0001
_b2008-04-04
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