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006			m d
007			cr nn 008maaau
008			090212s2006 ne q j eng d
020			_a9781402043673 (electronic bk.)
035			_a(Springer)978-1-4020-4365-9
039		9	_a200902121754 _bmuhaimin _c200902121016 _dmuhaimin _c200804041002 _dmuhaimin _c200804040928 _dmuhaimin _y04-03-2008 _zmuhaimin
050	0	0	_aTK7895.G36 _bN37 2005
082	0	4	_a621.39 _222
111	2		_aNATO Advanced Research Workshop on Defects in High-K Dielectric Nano-electronic Semiconductor Devices _d(2005 : _cSaint Petersburg, Russia)
245	1	0	_aDefects in High-k Gate Dielectric Stacks _h[electronic resource] : _bNano-Electronic Semiconductor Devices / _cedited by Evgeni Gusev.
260			_aDordrecht : _bSpringer, _c2006.
300			_ax, 492 p. : _bill., digital ; _c25 cm.
490	0		_aNATO Science Series II: Mathematics, Physics and Chemistry, _x1568-2609 ; _v220
650		0	_aGate array circuits _vCongresses.
650		0	_aDielectrics _vCongresses.
650		0	_aSemiconductors _xDefects _vCongresses.
650	1	4	_aEngineering.
650	2	4	_aElectronic and Computer Engineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aPhysics and Applied Physics in Engineering.
650	2	4	_aCondensed Matter.
700	1		_aGusev, Evgeni.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer e-books
856	4	0	_uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/1-4020-4367-8
907			_a.b14131845 _b2024-04-05 _c2019-11-12
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999			_c409164 _d409164