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| 020 | _a9780387288437 (electronic bk.) | ||
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| 035 | _a(Springer)978-0-387-28842-0 | ||
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| 100 | 1 | _aLaconte, J. | |
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_aMicromachined Thin-Film Sensors for SOI-CMOS Co-Integration _h[electronic resource] / _cby J. Laconte, D. Flandre, J. -P. Raskin. |
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_aBoston, MA : _bSpringer, _c2006. |
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_axiii, 292 p. : _bill., digital ; _c25 cm. |
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_aGas flow. _959874 |
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| 650 | 0 | _aThin film devices. | |
| 650 | 0 | _aSilicon-on-insulator technology. | |
| 650 | 0 | _aMetal oxide semiconductors, Complementary. | |
| 700 | 1 | _aFlandre, D. | |
| 700 | 1 | _aRaskin, J. -P. | |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer e-books | |
| 856 | 4 | 0 | _uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/http://dx.doi.org/10.1007/0-387-28843-0 |
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