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020 _a9780387288437 (electronic bk.)
020 _a9780387288420 (paper)
035 _a(Springer)978-0-387-28842-0
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090 _aQC168
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100 1 _aLaconte, J.
245 1 0 _aMicromachined Thin-Film Sensors for SOI-CMOS Co-Integration
_h[electronic resource] /
_cby J. Laconte, D. Flandre, J. -P. Raskin.
260 _aBoston, MA :
_bSpringer,
_c2006.
300 _axiii, 292 p. :
_bill., digital ;
_c25 cm.
650 0 _aGas flow.
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650 0 _aThin film devices.
650 0 _aSilicon-on-insulator technology.
650 0 _aMetal oxide semiconductors, Complementary.
700 1 _aFlandre, D.
700 1 _aRaskin, J. -P.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer e-books
856 4 0 _uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/http://dx.doi.org/10.1007/0-387-28843-0
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