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020 _a9780387233130 (electronic bk.)
020 _a9780387231167 (paper)
035 _a(Springer)978-0-387-23116-7
039 9 _a200902171223
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050 0 0 _aQC702.7.B65
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082 0 0 _a621.38152
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090 _aQC702.7.B65
_bI61 2005
245 0 0 _aIntroduction to Focused Ion Beams
_h[electronic resource] :
_bInstrumentation, Theory, Techniques and Practice /
_cedited by Lucille A. Giannuzzi, Fred A. Stevie.
260 _aBoston, MA :
_bSpringer Science+Business Media, Inc.,
_c2005.
300 _axiv, 357 p. :
_bill., digital ;
_c25 cm.
650 0 _aFocused ion beams.
650 1 4 _aPhysics.
650 2 4 _aOptical and Electronic Materials.
650 2 4 _aSurfaces and Interfaces, Thin Films.
650 2 4 _aCondensed Matter.
650 2 4 _aSolid State Physics and Spectroscopy.
700 1 _aGiannuzzi, Lucille A.
700 1 _aStevie, Fred A.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer e-books
856 4 0 _uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/b101190
907 _a.b14120021
_b2022-04-06
_c2019-11-12
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998 _ae
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