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| 008 | 090217s2005 mau j eng d | ||
| 020 | _a9780387230375 (electronic bk.) | ||
| 020 | _a9781402080135 (paper) | ||
| 035 | _a(Springer)978-1-4020-8013-5 | ||
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| 100 | 1 | _aLobontiu, Nicolae. | |
| 245 | 1 | 0 |
_aMechanics of Microelectromechanical Systems _h[electronic resource] / _cby Nicolae Lobontiu, Ephrahim Garcia. |
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_aBoston, MA : _bSpringer Science + Business Media, Inc., _c2005. |
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_axi, 405 p. : _bill., digital ; _c25 cm. |
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| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 1 | 4 | _aEngineering. |
| 650 | 2 | 4 | _aMechanical Engineering. |
| 700 | 1 | _aGarcia, Ephrahim. | |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer e-books | |
| 856 | 4 | 0 | _uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/b100026 |
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_a.b14113788 _b2022-04-06 _c2019-11-12 |
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