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020 _a9780387230375 (electronic bk.)
020 _a9781402080135 (paper)
035 _a(Springer)978-1-4020-8013-5
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090 _aTK7875
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100 1 _aLobontiu, Nicolae.
245 1 0 _aMechanics of Microelectromechanical Systems
_h[electronic resource] /
_cby Nicolae Lobontiu, Ephrahim Garcia.
260 _aBoston, MA :
_bSpringer Science + Business Media, Inc.,
_c2005.
300 _axi, 405 p. :
_bill., digital ;
_c25 cm.
650 0 _aMicroelectromechanical systems.
650 1 4 _aEngineering.
650 2 4 _aMechanical Engineering.
700 1 _aGarcia, Ephrahim.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer e-books
856 4 0 _uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/b100026
907 _a.b14113788
_b2022-04-06
_c2019-11-12
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