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008 090217s2005 gw j eng d
020 _a9783540294993 (electronic bk.)
020 _a9783540262442 (paper)
035 _a(Springer)978-3-540-26244-2
039 9 _a200902171845
_bmuhaimin
_y04-03-2008
_zmuhaimin
050 0 0 _aQC611.6.D4
_bP4713 2005
082 0 0 _a621.38152
_222
090 _aQC611.6.D4
_bP437 2005
100 1 _aPerevoschikov, Victor A..
245 1 0 _aGettering Defects in Semiconductors
_h[electronic resource] /
_cby Victor A. Perevoschikov, Vladimir D. Skoupov.
260 _aBerlin, Heidelberg :
_bSpringer Berlin Heidelberg,
_c2005.
300 _axv, 386 p. :
_bill., digital ;
_c25 cm.
440 0 _aSpringer Series in Advanced Microelectronics,
_x1437-0387 ;
_v19
650 0 _aSemiconductors
_xDefects.
650 0 _aSemiconductors
_xMaterials.
650 0 _aGetters.
650 1 4 _aChemistry.
_959425
650 2 4 _aOptical and Electronic Materials.
650 2 4 _aIndustrial Chemistry/Chemical Engineering.
700 1 _aSkoupov, Vladimir D..
710 2 _aSpringerLink (Online service)
773 0 _tSpringer e-books
856 4 0 _uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/3-540-29499-6
907 _a.b14102808
_b2022-04-06
_c2019-11-12
942 _n0
_kQC611.6.D4 P437 2005
914 _avtls003367651
998 _ae
_b2008-03-04
_cm
_dz
_feng
_ggw
_y0
_z.b14102808
999 _c406264
_d406264