000			01917nam a22004935a 4500
005			20250930123707.0
006			m d
007			cr nn 008maaau
008			090217s2005 gw j eng d
020			_a9783540273721 (electronic bk.)
020			_a9783540237822 (paper)
035			_a(Springer)978-3-540-23782-2
039		9	_a200902171845 _bmuhaimin _y04-03-2008 _zmuhaimin
050	0	0	_aTK7875 _b.H54 2005
082	0	0	_a621.39732 _222
090			_aTK7875 _b.H633 2005
100	1		_aHierlemann, Andreas.
245	1	0	_aIntegrated Chemical Microsensor Systems in CMOS Technology _h[electronic resource] / _cby Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann.
260			_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2005.
300			_aix, 229 p. : _bill., digital ; _c25 cm.
440		0	_aMicrotechnology and MEMS, _x1615-8326
650		0	_aMetal oxide semiconductors, Complementary.
650		0	_aMicroelectromechanical systems.
650		0	_aSensorimotor integration.
650	1	4	_aChemistry. _959425
650	2	4	_aOptical and Electronic Materials.
650	2	4	_aNanotechnology.
650	2	4	_aSurfaces and Interfaces, Thin Films.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aAnalytical Chemistry.
650	2	4	_aMeasurement Science, Instrumentation.
700	1		_aBaltes, H..
700	1		_aFujita, Hiroyuki.
700	1		_aLiepmann, Dorian.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer e-books
856	4	0	_uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/b138987
907			_a.b14102742 _b2022-04-06 _c2019-11-12
942			_n0 _kTK7875 .H633 2005
914			_avtls003367645
998			_ae _b2008-03-04 _cm _dz _feng _ggw _y0 _z.b14102742
999			_c406258 _d406258