000			01668nam a22004215a 4500
005			20250930123706.0
006			m d
007			cr nn 008maaau
008			090217s2005 gw j eng d
020			_a9783540268765 (electronic bk.)
020			_a9783540221098 (paper)
035			_a(Springer)978-3-540-22109-8
039		9	_a200902171845 _bmuhaimin _y04-03-2008 _zmuhaimin
050	0	4	_aQC611.8.S5 _bF48 2005
082	0	0	_a620.193 _222
090			_aQC611.8.S5 _bF944 2005
100	1		_aFruhauf, Joachim.
245	1	0	_aShape and Functional Elements of the Bulk Silicon Microtechnique _h[electronic resource] : _bA Manual of Wet-Etched Silicon Structures / _cby Joachim Fruhauf.
260			_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2005.
300			_axii, 221 p. : _bill., digital ; _c24 cm.
650		0	_aSilicon.
650		0	_aDetectors.
650	1	4	_aChemistry. _959425
650	2	4	_aOptical and Electronic Materials.
650	2	4	_aCeramics, Glass, Composites, Natural Methods.
650	2	4	_aMicrowaves, RF and Optical Engineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aIndustrial Chemistry/Chemical Engineering.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer e-books
856	4	0	_uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/b138230
907			_a.b14102651 _b2022-04-06 _c2019-11-12
942			_n0 _kQC611.8.S5 F944 2005
914			_avtls003367636
998			_ae _b2008-03-04 _cm _dz _feng _ggw _y0 _z.b14102651
999			_c406249 _d406249