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| 008 | 090217s2005 mau j eng d | ||
| 020 | _a9780387233192 (electronic bk.) | ||
| 020 | _a9780387233109 (paper) | ||
| 035 | _a(Springer)978-0-387-23310-9 | ||
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_a200902171844 _bmuhaimin _y04-03-2008 _zmuhaimin |
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_aElectroceramic-Based MEMS _h[electronic resource] : _bFabrication-Technology and Applications / _cedited by Nava Setter. |
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_aBoston, MA : _bSpringer Science+Business Media, Inc., _c2005. |
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_axii, 414 p. : _bill., digital ; _c25 cm. |
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| 440 | 0 |
_aElectronic Materials: Science and Technology, _x1386-3290 ; _v9 |
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| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 1 | 4 |
_aChemistry. _959425 |
| 650 | 2 | 4 | _aOptical and Electronic Materials. |
| 650 | 2 | 4 | _aNanotechnology. |
| 650 | 2 | 4 | _aCharacterization and Evaluation Materials. |
| 650 | 2 | 4 | _aCeramics, Glass, Composites, Natural Methods. |
| 650 | 2 | 4 | _aElectronics and Microelectronics, Instrumentation. |
| 700 | 1 | _aSetter, Nava. | |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer e-books | |
| 856 | 4 | 0 | _uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/b101200 |
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