000			01631nam a22003975a 4500
005			20250930123652.0
006			m d
007			cr nn 008maaau
008			090205s2007 gw j eng d
020			_a9783540445029 (electronic bk.)
020			_a9783540445005 (paper)
035			_a(Springer)978-3-540-44500-5
039		9	_a200902050912 _bmuhaimin _c200804041926 _dmuhaimin _y04-02-2008 _zmuhaimin
050	0	0	_aQC176.8.S72 _bS685 2007
082	0	0	_a530.416 _222
090			_aQC176.8.S72 _bS772 2007
245	0	0	_aSputtering by Particle Bombardment _h[electronic resource] : _bExperiments and Computer Calculations from Threshold to MeV Energies / _cedited by Rainer Behrisch, Wolfgang Eckstein.
260			_aBerlin Heidelberg : _bSpringer-Verlag GmbH., _c2007.
300			_axvii, 507 p. : _bill. (some col.), digital ; _c21 cm.
440		0	_aTopics in Applied Physics, _x0303-4216 ; _v110
650		0	_aSputtering (Physics).
650	1	4	_aChemistry. _959425
650	2	4	_aAtoms and Molecules in Strong Fields, Plasma Physics.
650	2	4	_aSurfaces and Interfaces, Thin Films.
700	1		_aBehrisch, Rainer.
700	1		_aEckstein, Wolfgang.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer e-books
856	4	0	_uhttps://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/978-3-540-44502-9
907			_a.b1409924x _b2022-04-06 _c2019-11-12
942			_n0 _kQC176.8.S72 S772 2007
914			_avtls003367280
998			_ae _b2008-02-04 _cm _dz _feng _ggw _y0 _z.b1409924x
999			_c405916 _d405916