| 000 | 01172cam a22003134a 4500 | ||
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| 005 | 20250914160804.0 | ||
| 008 | 070615s2005 flua b 001 0 eng | ||
| 020 |
_a0849328381 (alk. paper) _cRM232.81 |
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| 039 | 9 |
_a200803121511 _blan _c200712271444 _didah _c200706150957 _drahah _y06-15-2007 _zrahah |
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| 040 | _aUKM | ||
| 090 | _aTK7875.L976 2005 3 | ||
| 090 |
_aTK7875 _b.L96 2005 |
||
| 100 | 1 | _aLyshevski, Sergey Edward | |
| 245 | 1 | 0 |
_aNano- and micro-electromechanical systems : _bfundamentals of nano- and microengineering / _cSergey Edward Lyshevski |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton : _bCRC Press, _c2005 |
||
| 300 |
_a722 p. : _bill. ; _c26 cm. |
||
| 440 | 0 |
_aNano- and microscience, engineering, technology, and medicine series ; _v8 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aNanotechnology | |
| 907 |
_a.b13948428 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7875.L976 2005 3 |
||
| 914 | _avtls003351126 | ||
| 991 | _aInstitut Kejuruteraan Mikro & Nanoelektronik | ||
| 998 |
_al _b2007-02-06 _cm _da _feng _gflu _y0 _z.b13948428 |
||
| 999 |
_c391596 _d391596 |
||