| 000 | 01196cam a22003254a 4500 | ||
|---|---|---|---|
| 005 | 20250914160804.0 | ||
| 008 | 070615s2005 flua b 001 0 eng | ||
| 020 |
_a0824758242 (alk. paper) _cRM598.40 |
||
| 020 |
_a0824758242 (alk. paper) _cRM598.58 |
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| 039 | 9 |
_a200803121553 _blan _c200803121542 _dlan _c200802291509 _drahah _c200712271223 _didah _y06-15-2007 _zrahah |
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| 040 | _aUKM | ||
| 090 | _aTK153.A44 pasca | ||
| 090 |
_aTK153 _b.A44 |
||
| 100 | 1 | _aAllen, James J. | |
| 245 | 1 | 0 |
_aMicro electro mechanical system design / _cJames J. Allen |
| 260 |
_aBoca Raton : _bTaylor & Francis, _c2005 |
||
| 300 |
_a465 p. : _bill. ; _c23 cm. |
||
| 490 | 1 |
_aMechanical engineering ; _v192 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction |
|
| 650 | 0 | _aEngineering design | |
| 830 | 0 |
_aMechanical engineering (Taylor & Francis) ; _v192 |
|
| 907 |
_a.b13948398 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK153.A44 pasca |
||
| 914 | _avtls003351122 | ||
| 990 | _arab | ||
| 991 | _aInstitut Kejuruteraan Mikro & Nanoelektronik | ||
| 998 |
_al _b2007-02-06 _cm _da _feng _gflu _y0 _z.b13948398 |
||
| 999 |
_c391593 _d391593 |
||