000 01196cam a22003254a 4500
005 20250914160804.0
008 070615s2005 flua b 001 0 eng
020 _a0824758242 (alk. paper)
_cRM598.40
020 _a0824758242 (alk. paper)
_cRM598.58
039 9 _a200803121553
_blan
_c200803121542
_dlan
_c200802291509
_drahah
_c200712271223
_didah
_y06-15-2007
_zrahah
040 _aUKM
090 _aTK153.A44 pasca
090 _aTK153
_b.A44
100 1 _aAllen, James J.
245 1 0 _aMicro electro mechanical system design /
_cJames J. Allen
260 _aBoca Raton :
_bTaylor & Francis,
_c2005
300 _a465 p. :
_bill. ;
_c23 cm.
490 1 _aMechanical engineering ;
_v192
504 _aIncludes bibliographical references and index
650 0 _aMicroelectromechanical systems
_xDesign and construction
650 0 _aEngineering design
830 0 _aMechanical engineering (Taylor & Francis) ;
_v192
907 _a.b13948398
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTK153.A44 pasca
914 _avtls003351122
990 _arab
991 _aInstitut Kejuruteraan Mikro & Nanoelektronik
998 _al
_b2007-02-06
_cm
_da
_feng
_gflu
_y0
_z.b13948398
999 _c391593
_d391593