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039 9 _a200708031111
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_y06-08-2007
_zzulkifli
090 _aTK7871.85.H648 2006 tesis 3
090 _aTK7871.85
_b. H648 2006 3
100 1 _aHoh, Huey Jiun
245 1 0 _aKesan penipisan wafer terhadap keutuhan mekanikal wafer silikon dan proses pemotongan /
_cHoh Huey Jiun
260 _aBangi :
_bFakulti Kejuruteraan, Universiti Kebangsaan Malaysia,
_c2006
300 _axvi, 122 p. :
_bill. ;
_c30 cm.
502 _aTesis (Sarjana Sains) - Universiti Kebangsaan Malaysia, 2006
504 _aRujukan : p. 114 - 122
610 2 0 _aUniversiti Kebangsaan Malaysia
_xDissertations
_962865
650 0 _aDissertations, Academic
_zMalaysia
_962866
650 0 _aSemiconductor wafers
_xDesign and construction
650 0 _aSemiconductor
650 0 _aIntegrated circuits
907 _a.b13942967
_b2021-05-28
_c2019-11-12
942 _c3
_n0
_kTK7871.85.H648 2006 tesis 3
914 _avtls003350547
990 _amh
991 _aFakulti Kejuruteraan
998 _al0013
_b2007-08-06
_cm
_dx
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_gmy
_y0
_z.b13942967
999 _c391079
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