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008 070402s2006 njua b 001 0 eng
020 _a0131472860
_cRM435.42
039 9 _a201412011508
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_c200705231614
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_drasyilla
_y04-02-2007
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090 _aTK7875.L583 3
090 _aTK7875
_b.L583
100 1 _aLiu, Chang
245 1 0 _aFoundations of MEMS /
_cChang Liu
260 _aUpper Saddle River, NJ :
_bPearson/Prentice Hall,
_c2006
300 _axxii, 530 p. :
_bill. ;
_c25 cm.
504 _aIncludes bibliographical references and index
526 _cBuku bacaan asas fakulti
650 0 _aMicroelectromechanical systems
907 _a.b13892320
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTK7875.L583 3
914 _avtls003345062
990 _aza
991 _aJabatan Kejuruteraan Mekanik dan Bahan
998 _al
_b2007-02-04
_cm
_da
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_gnju
_y0
_z.b13892320
999 _c386286
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