| 000 | 00957nam a2200277 a 4500 | ||
|---|---|---|---|
| 005 | 20250914155458.0 | ||
| 008 | 070402s2006 njua b 001 0 eng | ||
| 020 |
_a0131472860 _cRM435.42 |
||
| 039 | 9 |
_a201412011508 _blatihan _c200705231614 _dbedah _c200704180958 _drasyilla _y04-02-2007 _zfarid |
|
| 090 | _aTK7875.L583 3 | ||
| 090 |
_aTK7875 _b.L583 |
||
| 100 | 1 | _aLiu, Chang | |
| 245 | 1 | 0 |
_aFoundations of MEMS / _cChang Liu |
| 260 |
_aUpper Saddle River, NJ : _bPearson/Prentice Hall, _c2006 |
||
| 300 |
_axxii, 530 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 526 | _cBuku bacaan asas fakulti | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 907 |
_a.b13892320 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7875.L583 3 |
||
| 914 | _avtls003345062 | ||
| 990 | _aza | ||
| 991 | _aJabatan Kejuruteraan Mekanik dan Bahan | ||
| 998 |
_al _b2007-02-04 _cm _da _feng _gnju _y0 _z.b13892320 |
||
| 999 |
_c386286 _d386286 |
||