| 000 | 01138cam a22003014a 4500 | ||
|---|---|---|---|
| 005 | 20250914155234.0 | ||
| 008 | 070207s2006 nyua b 001 0 eng | ||
| 020 |
_a0750309768 _cRM551.13 |
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| 039 | 9 |
_a200704161519 _bjamil _c200704120917 _didah _c200702071445 _drahah _y02-07-2007 _zrahah |
|
| 090 | _aTA2020.M35 3 | ||
| 090 |
_aTA2020 _b.M35 |
||
| 100 | 1 |
_aMakabe, T. _q(Toshiaki) |
|
| 245 | 1 | 0 |
_aPlasma electronics : _bapplications in microelectronic device fabrication / _cT. Makabe, Z. Petrovic |
| 260 |
_aNew York : _bTaylor & Francis, _c2006 |
||
| 300 |
_a339 p. : _bill. ; _c25 cm. |
||
| 440 | 0 | _aSeries in plasma physics | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aPlasma engineering | |
| 700 | 1 | _aPetrovi{u28EC} Z. | |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0653/2005056888-d.html |
| 907 |
_a.b13859092 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTA2020.M35 3 |
||
| 914 | _avtls003341447 | ||
| 990 | _ajj | ||
| 991 | _aJabatan Kejuruteraan Elektrik, Elektronik & Sistem | ||
| 998 |
_al _b2007-07-02 _cm _da _feng _gnyu _y0 _z.b13859092 |
||
| 999 |
_c383298 _d383298 |
||