| 000 | 01111cam a22002894a 4500 | ||
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| 005 | 20250914155233.0 | ||
| 008 | 070207s2006 flua b 001 0 eng | ||
| 020 |
_a0824723058 (alk. paper) _cRM551.13 |
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| 039 | 9 |
_a200704161533 _bjamil _c200704120914 _didah _c200702071443 _drahah _y02-07-2007 _zrahah |
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| 090 | _aTK7875.B36 3 | ||
| 090 |
_aTK7875 _b.B36 |
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| 100 | 1 | _aBanks, Danny | |
| 245 | 1 | 0 |
_aMicroengineering, MEMS, and interfacing : _ba practical guide / _cDanny Banks |
| 260 |
_aBoca Raton, FL : _bCRC/Taylor & Francis, _c2006 |
||
| 300 |
_a326 p. : _bill. ; _c24 cm. |
||
| 490 | 0 |
_aMechanical engineering ; _v199 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0648/2006042635-d.html |
| 907 |
_a.b13859079 _b2021-05-28 _c2019-11-12 |
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| 942 |
_c01 _n0 _kTK7875.B36 3 |
||
| 914 | _avtls003341445 | ||
| 990 | _ajj | ||
| 991 | _aJabatan Kejuruteraan Elektrik, Elektronik & Sistem | ||
| 998 |
_al _b2007-07-02 _cm _da _feng _gflu _y0 _z.b13859079 |
||
| 999 |
_c383297 _d383297 |
||