000 01111cam a22002894a 4500
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008 070207s2006 flua b 001 0 eng
020 _a0824723058 (alk. paper)
_cRM551.13
039 9 _a200704161533
_bjamil
_c200704120914
_didah
_c200702071443
_drahah
_y02-07-2007
_zrahah
090 _aTK7875.B36 3
090 _aTK7875
_b.B36
100 1 _aBanks, Danny
245 1 0 _aMicroengineering, MEMS, and interfacing :
_ba practical guide /
_cDanny Banks
260 _aBoca Raton, FL :
_bCRC/Taylor & Francis,
_c2006
300 _a326 p. :
_bill. ;
_c24 cm.
490 0 _aMechanical engineering ;
_v199
504 _aIncludes bibliographical references and index
650 0 _aMicroelectromechanical systems
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/enhancements/fy0648/2006042635-d.html
907 _a.b13859079
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTK7875.B36 3
914 _avtls003341445
990 _ajj
991 _aJabatan Kejuruteraan Elektrik, Elektronik & Sistem
998 _al
_b2007-07-02
_cm
_da
_feng
_gflu
_y0
_z.b13859079
999 _c383297
_d383297