000			01534cam a22003494a 4500
005			20250914154253.0
008			060915s2006 nyua bi 001 0 eng
020			_a0071455388 _cRM580.80
039		9	_a200702231156 _bariff _c200702071010 _didah _c200612261507 _drahah _c200609151643 _y09-15-2006 _zrahah
090			_aTK7875.L634 3
090			_aTK7875 _b.L634
100	1		_aLobontiu, Nicolae
245	1	0	_aMechanical design of microresonators : _bmodeling and applications / _cNicolae Lobontiu
260			_aNew York : _bMcGraw-Hill, _c2006
300			_axiii, 342 p. : _bill. ; 23 cm.
440		0	_aMcGraw-Hill nanoscience and technology series
504			_aIncludes bibliographical references and index
650		0	_aMicroelectromechanical systems _xDesign and construction
650		0	_aElectric resonators _xDesign and construction
650		0	_aVibrators _xDesign and construction
650		0	_aDetectors _xDesign and construction
856	4	2	_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy0625/2005051140-b.html
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0625/2005051140-d.html
856	4	1	_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0625/2005051140-t.html
907			_a.b13802884 _b2021-05-28 _c2019-11-12
942			_c01 _n0 _kTK7875.L634 3
914			_avtls003335119
990			_amaa
991			_aJabatan Kejuruteraan Mikroelektronik
998			_al _b2006-02-09 _cm _da _feng _gnyu _y0 _z.b13802884
999			_c378255 _d378255