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_aMicro process engineering : _bfundamentals, devices, fabrication, and applications / _cvolume editor : Norbert Kockmann |
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_aWeinheim : _bWiley-VCH , _c2006 |
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_axxii, 507 p. : _bill. ; _c24 cm. |
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_aAdvanced micro & nanosystems ; _v5 |
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| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aProduction engineering | |
| 650 | 0 | _aMicrotechnology | |
| 700 | 1 | _aKockmann, Norbert | |
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_a.b13742309 _b2021-05-28 _c2019-11-12 |
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| 991 | _aInstitut Kejuruteraan Mikro & Nanoelektronik | ||
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