| 000 | 01383cam a22003498a 4500 | ||
|---|---|---|---|
| 005 | 20250914145232.0 | ||
| 008 | 070416s2005 nyua bi 001 0 eng | ||
| 020 |
_a0387245200 _cRM4,479.28 (5 Vol. set) |
||
| 039 | 9 |
_a200704161702 _bariff _c200704051300 _didah _c200605301905 _didah _y05-30-2006 _zidah |
|
| 090 | _aTK153.M46 | ||
| 090 |
_aTK153 _b.M46 |
||
| 245 | 0 | 0 |
_aMEMS/NEMS : _bhandbook techniques and applications / _cedited by Cornelius T. Leondes |
| 260 |
_aNew York : _bSpringer, _c2005 |
||
| 300 |
_a5 v. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 505 | 0 |
_gv. 1. _tDesign methods -- _gv. 2. _tFabrication techniques -- _gv. 3. _tManufacturing methods -- _gv. 4. _tSensors and actuators -- _gv. 5. _tMedical applications |
|
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction |
|
| 650 | 0 | _aNanotechnology | |
| 700 | 1 | _aLeondes, Cornelius T. | |
| 740 |
_aDesign methods ; _nvol. 1 |
||
| 740 |
_aFabrication techniques ; _nvol. 2 |
||
| 740 |
_aManufacturing methods ; _nvol. 3 |
||
| 740 |
_aSensors and actuators ; _nvol. 4 |
||
| 740 |
_aMedical applications ; _nvol. 5 |
||
| 907 |
_a.b13739189 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK153.M46 |
||
| 914 | _avtls003328239 | ||
| 990 | _amaa | ||
| 991 | _aProgram Sains Bahan | ||
| 998 |
_al _b2006-04-05 _cm _da _feng _gnyu _y0 _z.b13739189 |
||
| 999 |
_c372304 _d372304 |
||