| 000 | 01232cam a2200325 a 4500 | ||
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| 005 | 20250930121834.0 | ||
| 008 | 051001m20059999ne a 001 0 eng | ||
| 020 |
_a008044640X (v. 1) _cRM575.85 |
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| 039 | 9 |
_a200705281514 _bjamil _c200705240821 _didah _c200703141608 _drahah _c200703141605 _y05-29-2006 _zidah |
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| 090 | _aTK7871.15.F5M335 2005 3 | ||
| 090 |
_aTK7871.15.F5 _bM335 2005 |
||
| 100 | 1 | _aMachlin, E. S. | |
| 245 | 1 | 0 |
_aMaterials science in microelectronics / _cE.S. Machlin |
| 250 | _a2nd ed. | ||
| 260 |
_aAmsterdam : _bElsevier, _c2005- |
||
| 300 |
_a1 v. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes index | ||
| 505 | 0 |
_gvol. 1. _tThe relationships between thin film processing and structure |
|
| 650 | 0 | _aThin films | |
| 650 | 0 |
_aMicroelectronics _960418 |
|
| 740 | 4 |
_aThe relationships between thin film processing and structures ; _nvol. 1 |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0629/2005934958-d.html |
| 907 |
_a.b13738653 _b2021-05-28 _c2019-11-12 |
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| 942 |
_c01 _n0 _kTK7871.15.F5M335 2005 3 |
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| 914 | _avtls003328177 | ||
| 990 | _ajj | ||
| 991 | _aJabatan Mekanik & Bahan (KMB) | ||
| 998 |
_al _b2006-03-05 _cm _da _feng _gne _y0 _z.b13738653 |
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| 999 |
_c372257 _d372257 |
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