| 000 | 01307cam a22003254a 4500 | ||
|---|---|---|---|
| 005 | 20250914143514.0 | ||
| 008 | 001005s2001 xxua b 001 0 eng | ||
| 010 | _a00-051022 | ||
| 020 |
_a0195136055 _cRM84.90 |
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| 039 | 9 |
_a200607071505 _bjamil _c200607031139 _drahah _c200605221711 _dzakir _y05-22-2006 _zzakir |
|
| 090 | _aTK7871.85.C25 2001 3 | ||
| 090 |
_aTK7871.85 _b.C25 2001 |
||
| 100 | 1 |
_aCampbell, Stephen A., _d1954- |
|
| 245 | 1 | 4 |
_aThe science and engineering of microelectronic fabrication / _cStephen A. Campbell |
| 250 | _a2nd ed. | ||
| 260 |
_aNew York : _bOxford University Press, _c2001 |
||
| 300 |
_axiv, 603 p. : _bill. ; _c24 cm. |
||
| 440 | 4 | _aThe Oxford series in electrical and computer engineering | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0610/00051022-d.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/enhancements/fy0610/00051022-t.html |
| 907 |
_a.b13734301 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7871.85.C25 2001 3 |
||
| 914 | _avtls003327718 | ||
| 990 | _ajj | ||
| 991 | _aInstitut Sains Angkasa - Pasca | ||
| 998 |
_al _b2006-09-05 _cm _da _feng _gxxu _y0 _z.b13734301 |
||
| 999 |
_c371838 _d371838 |
||