000			01486cam a22003618a 4500
005			20250914143511.0
008			050601s2005 xxua bi 001 0 eng
020			_a1402032382 _cRM414.74
039		9	_a201311291801 _blan _c200705081151 _djamil _c200704230917 _didah _c200605221525 _dzakir _y05-22-2006 _zzakir
040			_dUKM
090			_aQC688.P75
090			_aQC688 _b.P75
245	0	0	_aPrinciples and applications of NanoMEMS physics / _cedited by Hector De Los Santos.
260			_aDordrecht, Netherlands : _bSpringer, _c2005.
300			_avx, 254 p. : _bill. ; _c24 cm.
490	1		_aMicrosystems ; _vv. 15.
504			_aIncludes index and references : p. 241-252.
505	0		_aNanoelectromechanical systems -- NanoMEMS physics: quantum wave-particle phenomena -- NanoMEMS physics: quantum wave-phenomena -- NanoMEMS applications: circuits and systems -- NanoMEMS applications: photonics.
650		0	_aQuantum electronics.
650		0	_aWave-particle duality.
650		0	_aNanotechnology.
650		0	_aMicroelectromechanical systems.
700	1		_aSantos, Hector J. de los.
830		0	_aMicrosystems (Series) ; _vv. 15.
856	4	1	_3Table of contents _uhttp://www.loc.gov/catdir/toc/ecip0513/2005015829.html.
907			_a.b13733618 _b2021-05-28 _c2019-11-12
942			_c01 _n0 _kQC688.P75
914			_avtls003327646
990			_ajj
991			_aInstitut Sains Angkasa
998			_at _b2006-09-05 _cm _da _feng _gxxu _y0 _z.b13733618
999			_c371771 _d371771