| 000 | 01104nam a2200313 a 4500 | ||
|---|---|---|---|
| 005 | 20250914143404.0 | ||
| 008 | 060112s2005 enka b 001 0 eng | ||
| 020 |
_a1855739313 (hbk.) _cRM1020.80 |
||
| 020 | _a9781855739314 (hbk.) | ||
| 039 | 9 |
_a200810151317 _bbedah _c200809251651 _drasyilla _c200803061301 _dsanusi _c200706211543 _drahah _y04-25-2006 _zidah |
|
| 040 | _aUKM | ||
| 090 | _aTK7874.N328 3 | ||
| 090 |
_aTK7874 _b.N328 |
||
| 245 | 0 | 0 |
_aNanolithography and patterning techniques in microelectonics / _cedited by David G. Bucknall |
| 260 |
_aCambridge, England : _bWoodhead Pub., _c2005 |
||
| 300 |
_axiv, 409 p. : _bill. ; _c24 cm. |
||
| 440 | 0 | _aWoodhead Publishing in materials | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicrolithography | |
| 650 | 0 | _aNanotechnology | |
| 700 | 1 | _aBucknall, David G. | |
| 907 |
_a.b13718769 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7874.N328 3 |
||
| 914 | _avtls003326069 | ||
| 990 | _ajj | ||
| 991 | _aInstitut Sains Angkasa | ||
| 998 |
_al _b2006-12-04 _cm _da _feng _genk _y0 _z.b13718769 |
||
| 999 |
_c370383 _d370383 |
||