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| 008 | 030715s2003 enka 000 0 eng | ||
| 010 | _a2003-015993 | ||
| 020 | _a1903996473 | ||
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_a200602130856 _bidah _y02-13-2006 _zidah |
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_aMicrosystems technology : _bfabrication, test & reliability / _cedited by Jumana Boussey. |
| 260 |
_aLondon ; _aSterling, VA : _bKogan Page Science, _c2003. |
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| 300 |
_avi, 295 p. : _bill. ; _c25 cm. |
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| 650 | 0 | _aMicroelectromechanical systems. | |
| 700 | 1 | _aBoussey, Jumana. | |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/ecip046/2003015993.html |
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_a.b13671881 _b2019-11-13 _c2019-11-12 |
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