| 000 | 01238cam a22003134a 4500 | ||
|---|---|---|---|
| 005 | 20250914142541.0 | ||
| 008 | 050525s2005 flu 001 0 eng | ||
| 020 |
_a1574447203 (alk. paper) _cRM535.93 |
||
| 039 | 9 |
_a200604261622 _bariff _c200603061518 _dariff _c200602221548 _didah _c200602071807 _didah _y02-07-2006 _zidah |
|
| 090 | _aTK7871.85.S46 3 | ||
| 090 |
_aTK7871.85 _b.S46 |
||
| 100 | 1 |
_aSherer, J. Michael, _d1958- |
|
| 245 | 1 | 0 |
_aSemiconductor industry : _bwafer fab exhaust management / _cJ. Michael Sherer |
| 246 | 3 | 0 | _aWafer fab exhaust management |
| 260 |
_aBoca Raton : _bCRC/Taylor & Francis, _c2005 |
||
| 300 |
_a194 p. ; _b25 cm. |
||
| 504 | _aIncludes bibliographical refrences and index | ||
| 650 | 0 |
_aSemiconductor wafers _xDesign and construction |
|
| 650 | 0 |
_aSemiconductor industry _xEnvironmental aspects |
|
| 650 | 0 |
_aVolatile organic compounds _xEnvironmental aspects |
|
| 650 | 0 |
_aAir _xPurification _xTechnological innovations |
|
| 907 |
_a.b13668419 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7871.85.S46 3 |
||
| 914 | _avtls003320780 | ||
| 990 | _amaa | ||
| 991 | _aInstitut Alam Sekitar & Pembangunan Lestari (L) | ||
| 998 |
_al _b2006-07-02 _cm _da _feng _gflu _y0 _z.b13668419 |
||
| 999 |
_c365507 _d365507 |
||