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020 _a082472447X (alk. paper)
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090 _aTA418.9.T45E544 3
090 _aTA418.9.T45
_bE544
245 0 0 _aEngineering thin films and nanostructures with ion beams /
_cedited by Emile Knystautas
260 _aBoca Raton, FL : Taylor & Francis, 2005
300 _a574 p. :
_bill. ;
_c24 cm
_e+ 1 CD-ROM (4 3/4 in.)
490 1 _aOptical engineering ;
_v92
500 _aBook is accompanied by one CD entitled'Engineering thin films and nanostructures with ion beams' bearing the same call number and available at Bahagian Koleksi Media
504 _aIncludes bibliographical references and index
650 0 _aThin films
650 0 _aNanostructures
_960468
650 0 _aIon bombardment
_xIndustrial applications
700 1 _aKnystautas, Emile J.
830 0 _aOptical engineering (Marcel Dekker, Inc.) ;
_vv. 92
907 _a.b13613595
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTA418.9.T45E544 3
914 _avtls003314935
990 _amaa
991 _aInstitut Kejuruteraan Mikro & Nanoelektronik
998 _al
_b2005-07-09
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_y0
_z.b13613595
999 _c360283
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