| 000 | 01192nam a2200325 a 4500 | ||
|---|---|---|---|
| 005 | 20250930120853.0 | ||
| 008 | 050729s2005 gw a f i 001 0 eng d | ||
| 020 |
_a3527310800 _cRM1,005.00 |
||
| 039 | 9 |
_a201401241722 _blan _c200610060924 _djamil _c200609251200 _didah _c200509301153 _ddollah _y07-29-2005 _zzakir |
|
| 040 | _dUKM | ||
| 090 | _aTK7875.C567 | ||
| 090 | _aTK7875.C567 | ||
| 245 | 0 | 0 |
_aCMOS - MEMS / _cvolume editors, O. Brand and G. K. Fedder. |
| 260 |
_aWeinheim : _bWiley-VCH, _c2005. |
||
| 300 |
_axiv, 596 p. : _bill. ; _c25 cm. |
||
| 440 | 0 |
_aAdvanced micro & nanosystems ; _vvol. 2. |
|
| 504 | _aIncludes index. | ||
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction. |
|
| 650 | 0 |
_aMetal oxide semiconductors, complementary _xDesign and construction. |
|
| 700 | 1 |
_aBrand, Oliver, _d1964- _955276 |
|
| 700 | 1 |
_aFedder, G. K. _q(Gary K.). |
|
| 907 |
_a.b13571679 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7875.C567 |
||
| 914 | _avtls003310301 | ||
| 990 | _amur | ||
| 991 | _aPusat Pengajian Fizik Gunaan | ||
| 991 | _aInstitut Kejuruteraan Mikro & Nanoelektronik | ||
| 998 |
_at _b2005-03-07 _cm _da _feng _ggw _y0 _z.b13571679 |
||
| 999 |
_c356275 _d356275 |
||