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| 090 | _aTK7867.C46 | ||
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_aTK7867 _b.C46 |
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| 245 | 0 | 4 |
_aThe chemistry of metal CVD / _cedited by Toivo T. Kodas and Mark J. Hampden-Smith |
| 260 |
_aWeinheim : _bVCH, _c1994 |
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| 300 |
_axxiv, 530 p. : _bill. ; _c24 cm. |
||
| 504 | _aBibliography : p. 417-427 | ||
| 650 | 0 | _aElectronic circuit design | |
| 650 | 0 | _aChemical vapor deposition | |
| 650 | 0 | _aMetallic films | |
| 700 | 1 | _aKodas, Toivo T. | |
| 700 | 1 | _aHampden-Smith, Mark J. | |
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_a.b1033449x _b2021-05-28 _c2019-11-12 |
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| 991 | _aFakulti Sains Fizik dan Gunaan | ||
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_al _b1999-05-08 _cm _da _feng _ggw _y0 _z.b1033449x |
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