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| 008 | 050602s2004 xxua g b 001 0 eng | ||
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| 090 | _aTK7875.M46 | ||
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_aMEMS mechanical sensors / _cStephen Beeby ... [et al.] |
| 260 |
_aBoston : _bArtech House, _c2004 |
||
| 300 |
_ax, 269 p. : _bill. ; _c26 cm. |
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| 490 | 1 | _aArtech House microelectromechanical system series | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aDetectors | |
| 700 | 1 | _aBeeby, Stephen | |
| 830 | 0 | _aMicroelectromechanical systems series | |
| 907 |
_a.b13542448 _b2021-05-28 _c2019-11-12 |
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| 942 |
_c01 _n0 _kTK7875.M46 |
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| 990 | _ajj | ||
| 991 | _aProgram Fizik | ||
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_al _b2005-02-06 _cm _da _feng _gxxu _y0 _z.b13542448 |
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| 999 |
_c353423 _d353423 |
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