| 000 | 01272cam a22003134a 4500 | ||
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| 005 | 20250930120426.0 | ||
| 008 | 050315s2004 xxua b 001 0 eng | ||
| 020 |
_a3540204814 (acid-free paper) _cRM690.03 |
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| 039 | 9 |
_a200507221508 _bhamudah _c200507221049 _dhamka _c200507041552 _dariff _c200503151640 _didah _y03-15-2005 _zidah |
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| 090 | _aTK7871.85.P73 3 | ||
| 090 | 0 | 0 | _aTK7871.85 |
| 245 | 0 | 0 |
_aPredictive simulation of semiconductor processing : _bstatus and challenges / _cJ. Dabrowski, E.R. Weber (eds.). |
| 260 |
_aBerlin : _bSpringer-Verlag, _c2004. |
||
| 300 |
_axvii, 490 p. : _bill. (some col.) ; _c24 cm. |
||
| 490 | 1 |
_aSpringer series in materials science, _x0933-033X ; _v72 |
|
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _xSimulation methods. |
|
| 650 | 0 |
_aMicroelectronics _xTechnological innovations. |
|
| 700 | 1 |
_aDabrowski, Jarek. _955073 |
|
| 700 | 1 | _aWeber, Eicke R. | |
| 830 | 0 |
_aSpringer series in materials science ; _vv. 72. |
|
| 907 |
_a.b13494144 _b2021-05-28 _c2019-11-12 |
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| 942 |
_c01 _n0 _kTK7871.85.P73 3 |
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| 914 | _avtls003301693 | ||
| 990 | _amaa | ||
| 991 | _aInstitut Kejuruteraan Mikro & Nanolektronik | ||
| 998 |
_al _b2005-02-03 _cm _da _feng _gxxu _y0 _z.b13494144 |
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| 999 |
_c348630 _d348630 |
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