| 000 | 01315cam a22003255a 4500 | ||
|---|---|---|---|
| 005 | 20250914135647.0 | ||
| 008 | 050315s2003 xxua b 001 0 eng | ||
| 020 |
_a3527403655 _cRM482.40 |
||
| 039 | 9 |
_a200506021449 _bhamka _c200505131634 _dariff _c200503151239 _didah _y03-15-2005 _zidah |
|
| 090 | _aTK7871.15.F5M47 3 | ||
| 090 | _aTK7871.15 | ||
| 245 | 0 | 0 |
_aMetal based thin films for electronics / _cKlaus Wetzig, Claus M. Schneider (eds.). |
| 260 |
_aWeinheim : _bWiley-VCH, _c2003. |
||
| 300 |
_ax, 378 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aThin films. | |
| 650 | 0 | _aMetallic films. | |
| 700 | 1 | _aWetzig, Klaus. | |
| 700 | 1 |
_aSchneider, Claus M. _q(Claus Michael) |
|
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/bios/wiley046/2004297416.html |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley041/2004297416.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/wiley041/2004297416.html |
| 907 |
_a.b13493814 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7871.15.F5M47 3 |
||
| 914 | _avtls003301652 | ||
| 990 | _amaa | ||
| 991 | _aInstitut Kejuruteraan Mikro & Nanoelektronik | ||
| 998 |
_al _b2005-02-03 _cm _da _feng _gxxu _y0 _z.b13493814 |
||
| 999 |
_c348597 _d348597 |
||