000			01434nam a22003377a 4500
005			20250914135637.0
008			050311s2004 xxua b 001 0 eng
020			_a0471232793 _cRM88.24
039		9	_a201412021447 _blatihan _c201310041640 _dlatihan _c200504011030 _dhamka _c200503281043 _dhamzah _y03-11-2005 _zzarina
090			_aTK7871.85.M378 2004 3
090			_aTK7871.85
100	1		_aMay, Gary S.
245	1	0	_aFundamentals of semiconductor fabrication / _cGary S. May, Simon M. Sze
250			_aWiley international ed.
260			_aNew York : _bWiley, _c2004
300			_axiii, 305 p. : _bill. ; _c26 cm.
504			_aIncludes bibliographical references and index
526			_aBuku bacaan asas fakulti
650		0	_aSemiconductors _xDesign and construction
650		0	_aIntegrated circuits _xDesign and construction
700	1		_aSze, S. M., _d1936-
856	4	2	_3Contributor biographical information _uhttp://www.loc.gov/catdir/bios/wiley044/2003276248.html
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley037/2003276248.html
856	4	1	_3Table of contents _uhttp://www.loc.gov/catdir/toc/wiley032/2003276248.html
907			_a.b13491799 _b2021-05-28 _c2019-11-12
942			_c01 _n0 _kTK7871.85.M378 2004 3
914			_avtls003301436
991			_aPusat Pengajian Fizik Gunaan - Pascassiwazah
998			_al _b2005-11-03 _cm _da _feng _gxxu _y0 _z.b13491799
999			_c348396 _d348396