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| 090 | _aT174.7.E53 3 | ||
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_aEnabling technology for MEMS and nanodevices / _cedited by H. Baltes...[et. al] |
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_aWeinheim : _bWiley VCH, _c2004 |
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_a427 p. : _bill. ; _c25 cm. |
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_aAdvanced micro & nanosystems ; _vv.1 |
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| 650 | 0 | _aNanotechnology | |
| 650 | 0 | _aMolecular electronics | |
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_aNanostructured materials _963530 |
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| 700 | 1 | _aBaltes, Henry | |
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_a.b13490369 _b2021-05-28 _c2019-11-12 |
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| 914 | _avtls003301288 | ||
| 990 | _amur | ||
| 991 | _aInstitut Kejuruteraan Mikro & Nanoelektronik | ||
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_al _b2005-09-03 _cm _da _feng _ggw _y0 _z.b13490369 |
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