000			01285cam a22003254a 4500
005			20250914135618.0
008			050304s2004 xxka b 001 0 eng
020			_a0470851058 (cloth) _cRM482.40
020			_a0470851066 (pbk.)
039		9	_a200506021412 _bhamka _c200505171525 _dariff _c200505171518 _dariff _c200503040931 _didah _y03-04-2005 _zidah
090			_aTK7875.F726 3
090	0	0	_aTK7875
100	1		_aFranssila, Sami.
245	1	0	_aIntroduction to microfabrication / _cSami Franssila.
260			_aChichester, West Sussex, England : _bJohn Wiley & Sons, _c2004.
300			_axvii, 401 p. : _bill. ; _c26 cm.
504			_aIncludes bibliographical references and index.
650		0	_aMicroelectromechanical systems.
650		0	_aElectronic apparatus and appliances.
650		0	_aMicrofabrication.
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley041/2004004940.html
856	4	1	_3Table of contents _uhttp://www.loc.gov/catdir/toc/wiley041/2004004940.html
907			_a.b1348798x _b2021-05-28 _c2019-11-12
942			_c01 _n0 _kTK7875.F726 3
914			_avtls003300990
990			_amaa
991			_aInstitut Kejuruteraan Mikro & Nanoelektronik
998			_al _b2005-04-03 _cm _da _feng _gxxk _y0 _z.b1348798x
999			_c348017 _d348017