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| 005 | 20250914135204.0 | ||
| 008 | 050203s1998 xxua b 001 0 eng | ||
| 020 |
_a0824799534 (hbk.) _cRM703.50 |
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_a201104271608 _bzabidah _c200503221144 _dhamudah _c200503221039 _dhamka _c200502171041 _dariff _y02-03-2005 _zidah |
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| 090 | _aTK7836.M525 3 | ||
| 090 |
_aTK7836 _b.M525 |
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| 245 | 0 | 0 |
_aMicrolithography : _bscience and technology / _cedited by James R. Sheats, Bruce W. Smith |
| 260 |
_aNew York : _bMarcel Dekker, _c1998 |
||
| 300 |
_axii, 780 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicrolithography _xIndustrial applications |
|
| 650 | 0 |
_aIntegrated circuits _xMasks |
|
| 650 | 0 |
_aMetal oxide semiconductors, complementary _xDesign and construction |
|
| 650 | 0 | _aManufacturing processes | |
| 700 | 1 |
_aSheats, James R., _d1948- |
|
| 700 | 1 |
_aSmith, Bruce W., _d1959- |
|
| 907 |
_a.b13478114 _b2021-05-28 _c2019-11-12 |
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_c01 _n0 _kTK7836.M525 3 |
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| 914 | _avtls003299914 | ||
| 990 | _amaa | ||
| 991 | _aJabatan Kejuruteraan Awam dan Struktur | ||
| 998 |
_al _b2005-03-02 _cm _da _feng _gxxu _y0 _z.b13478114 |
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| 999 |
_c347039 _d347039 |
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