| 000 | 01154cam a22003134a 4500 | ||
|---|---|---|---|
| 005 | 20250914134229.0 | ||
| 008 | 040820s2003 xxua bi 001 0 eng | ||
| 020 |
_a1584883065 (alk. paper) _cRM285.13 |
||
| 039 | 9 |
_a201402041203 _blan _c200412241108 _dariff _c200411221208 _dsanusi _c200409281232 _dhamka _y08-20-2004 _zsanusi |
|
| 040 | _dUKM | ||
| 090 | _aTK7875.P448 3 | ||
| 090 |
_aTK7875 _b.P448 |
||
| 090 |
_aTK7875 _b.P448 3 |
||
| 100 | 1 | _aPelesko, John A. | |
| 245 | 1 | 0 |
_aModeling MEMS and NEMS / _cJohn A. Pelesko and David H. Bernstein |
| 260 |
_aBoca Raton, FL : _bChapman & Hall/CRC, _c2003. |
||
| 300 |
_axxiii, 357 p. : _bill. ; 24 cm. |
||
| 504 | _aIncludes bibliographical references and i(p. 325-340) and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems _xMathematical models. |
|
| 700 | 1 | _aBernstein, David H. | |
| 907 |
_a.b13420410 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7875.P448 3 |
||
| 914 | _avtls003293862 | ||
| 990 | _afa | ||
| 991 | _aFakulti Sains Sosial dan Kemanusiaan | ||
| 991 | _aFakulti Kejuruteraan dan Alam Bina | ||
| 998 |
_al _at _b2004-07-08 _cm _da _feng _gxxu _y0 _z.b13420410 |
||
| 999 |
_c341322 _d341322 |
||