000 01154cam a22003134a 4500
005 20250914134229.0
008 040820s2003 xxua bi 001 0 eng
020 _a1584883065 (alk. paper)
_cRM285.13
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_blan
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_c200411221208
_dsanusi
_c200409281232
_dhamka
_y08-20-2004
_zsanusi
040 _dUKM
090 _aTK7875.P448 3
090 _aTK7875
_b.P448
090 _aTK7875
_b.P448 3
100 1 _aPelesko, John A.
245 1 0 _aModeling MEMS and NEMS /
_cJohn A. Pelesko and David H. Bernstein
260 _aBoca Raton, FL :
_bChapman & Hall/CRC,
_c2003.
300 _axxiii, 357 p. :
_bill. ; 24 cm.
504 _aIncludes bibliographical references and i(p. 325-340) and index.
650 0 _aMicroelectromechanical systems
_xMathematical models.
700 1 _aBernstein, David H.
907 _a.b13420410
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTK7875.P448 3
914 _avtls003293862
990 _afa
991 _aFakulti Sains Sosial dan Kemanusiaan
991 _aFakulti Kejuruteraan dan Alam Bina
998 _al
_at
_b2004-07-08
_cm
_da
_feng
_gxxu
_y0
_z.b13420410
999 _c341322
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