000 01154cam a22003254a 4500
005 20250914134229.0
008 040820s2002 xxua b 001 0 eng
020 _a0849311543 (alk. paper)
_cRM434.86
039 9 _a200409281250
_bhamka
_c200409060904
_dfarid
_c200408201516
_dsanusi
_y08-20-2004
_zsanusi
090 _aTJ1191.5.M563 pasca
090 _aTJ1191.5
100 1 _aMinh, Phan Ngoc
245 1 0 _aFabrication of silicon microprobes for optical near-field applications /
_cPhan Ngoc Minh, Ono Takahito, Esashi Masayoshi
260 _aBoca Raton, Fla. :
_bCRC Press,
_c2002
300 _a180 p. :
_bill. ;
_c25 cm.
504 _aIncludes bibliographical references and index
650 0 _aMicromachining
650 0 _aSilicon
650 0 _aNear-field microscopy
650 0 _aMicroprobe analysis
700 1 _aTakahito, Ono
700 1 _aMasayoshi, Esashi
907 _a.b13420331
_b2020-10-15
_c2019-11-12
942 _c01
_n0
_kTJ1191.5.M563 pasca
914 _avtls003293854
990 _afa
991 _aInstitut Kejuruteraan Mikro & Nanoelektronik
998 _al
_b2004-07-08
_cm
_da
_feng
_gxxu
_y0
_z.b13420331
999 _c341314
_d341314