| 000 | 01154cam a22003254a 4500 | ||
|---|---|---|---|
| 005 | 20250914134229.0 | ||
| 008 | 040820s2002 xxua b 001 0 eng | ||
| 020 |
_a0849311543 (alk. paper) _cRM434.86 |
||
| 039 | 9 |
_a200409281250 _bhamka _c200409060904 _dfarid _c200408201516 _dsanusi _y08-20-2004 _zsanusi |
|
| 090 | _aTJ1191.5.M563 pasca | ||
| 090 | _aTJ1191.5 | ||
| 100 | 1 | _aMinh, Phan Ngoc | |
| 245 | 1 | 0 |
_aFabrication of silicon microprobes for optical near-field applications / _cPhan Ngoc Minh, Ono Takahito, Esashi Masayoshi |
| 260 |
_aBoca Raton, Fla. : _bCRC Press, _c2002 |
||
| 300 |
_a180 p. : _bill. ; _c25 cm. |
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| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicromachining | |
| 650 | 0 | _aSilicon | |
| 650 | 0 | _aNear-field microscopy | |
| 650 | 0 | _aMicroprobe analysis | |
| 700 | 1 | _aTakahito, Ono | |
| 700 | 1 | _aMasayoshi, Esashi | |
| 907 |
_a.b13420331 _b2020-10-15 _c2019-11-12 |
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| 942 |
_c01 _n0 _kTJ1191.5.M563 pasca |
||
| 914 | _avtls003293854 | ||
| 990 | _afa | ||
| 991 | _aInstitut Kejuruteraan Mikro & Nanoelektronik | ||
| 998 |
_al _b2004-07-08 _cm _da _feng _gxxu _y0 _z.b13420331 |
||
| 999 |
_c341314 _d341314 |
||