000 01077nam a2200277 a 4500
008 040715s1997 xxua m 000 0 eng
020 _cRM252.78
039 9 _a200408021214
_bbakar
_c200407221007
_dbedah
_y07-15-2004
_zmazarita
090 _aTL589.2.A3L454 1997 tesis
100 1 _aLemkin, Mark Alan
245 1 0 _aMicro accelerometer design with digital feedback control /
_cby Mark Alan Lemkin
260 _aBarkeley :
_bUniversity of California,
_c1997
300 _avii, 114 p. :
_bill.;
_c18 cm.
502 _aThesis (Ph.D.) - University of California, Barkeley, 1997
504 _aBibliography : p. 109-114
610 2 0 _aUniversity of California, Berkeley
_xDissertations
650 0 _aAccelerometers
650 0 _aMicroelectromechanical systems
650 0 _aDissertations, Academic
_zUnited States
907 _a.b13404830
_b2020-09-28
_c2019-11-12
942 _c3
_n0
_kTL589.2.A3L454 1997 tesis
914 _avtls003292246
990 _asb/za
991 _aJabatan Kejuruteraan Mekanik & Bahan
998 _at
_b2004-02-07
_cm
_dx
_feng
_gxxu
_y0
_z.b13404830
999 _c339783
_d339783