000 01185nam a2200313 a 4500
005 20250914134111.0
008 040715s1990 xxua m 000 0 eng
020 _cRM252.78
039 9 _a200408021212
_bbakar
_c200407220940
_dbedah
_c200407150942
_dmazarita
_y07-15-2004
_zmazarita
090 _aQC176.8.M5C498 1990 tesis
090 _aQC176.8
100 1 _aCho, Young-Ho
245 1 0 _aDesign, fabrication, and optimization of micromechanical flexures /
_cby Young-Ho Cho
260 _aBerkeley :
_bUniversity of California,
_c1990
300 _axvii, 116 p. :
_bill. ;
_c18 cm.
502 _aThesis (Ph.D.) - University of California, Berkeley, 1990
504 _aReferences : p. 100-105
610 2 0 _aUniversity of California, Berkeley
_xDissertations
650 0 _aMicromechanics
650 0 _aMicroelectromechanical systems
650 0 _aDissertations, Academic
_zUnited States
907 _a.b13404556
_b2021-05-28
_c2019-11-12
942 _c3
_n0
_kQC176.8.M5C498 1990 tesis
914 _avtls003292217
990 _asb/za
991 _aJabatan Kejuruteraan Elektrik, Elektronik & Sistem
998 _at
_b2004-02-07
_cm
_dx
_feng
_gxxu
_y0
_z.b13404556
999 _c339755
_d339755