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| 005 | 20250914134001.0 | ||
| 008 | 040614s2003 xxua i 001 0 eng | ||
| 020 |
_a0125112211 _cRM743.70 |
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| 039 | 9 |
_a201204091824 _bjamil _c200407140949 _dhamudah _c200407120917 _dhamka _c200407051656 _dhamzah _y06-14-2004 _zzakir |
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| 040 | _aUKM | ||
| 090 | _aQC585.I57 | ||
| 090 |
_aQC585 _b.I57 |
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| 245 | 0 | 0 |
_aInterlayer dielectrics for semiconductor technologies / _cedited by S. P. Murarka, M. Eizenberg, A. K. Sinha |
| 260 |
_aAmsterdam : _bElsevier/Academic Press, _c2003 |
||
| 300 |
_axiv, 444 p. : _bill. ; _c25 cm. |
||
| 500 | _aIncludes index | ||
| 650 | 0 | _aDielectrics | |
| 650 | 0 | _aSemiconductors | |
| 700 | 1 | _aMurarka, S. P. | |
| 700 | 1 | _aEizenberg, M. | |
| 700 | 1 | _aSinha, A. K. | |
| 907 |
_a.b13393194 _b2021-05-28 _c2019-11-12 |
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| 942 |
_c01 _n0 _kQC585.I57 |
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| 914 | _avtls003291032 | ||
| 990 | _asbs/am | ||
| 991 | _aProgram Teknologi Kimia | ||
| 998 |
_at _b2004-01-06 _cm _da _feng _gxxu _y0 _z.b13393194 |
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| 999 |
_c338642 _d338642 |
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