000			01443cam a2200337 a 4500
005			20250914133947.0
008			040607s2002 xxua b 101 0 eng
020			_a0201444941 _cRM176.88
020			_a9780201444940
039		9	_a201602031023 _bros _c201602031022 _dros _c200407161254 _dhamka _c200407121205 _djamil _y06-07-2004 _zzakir
090			_aTK7874.J33 2002
090			_aTK7874
100	1		_aJaeger, Richard C.
245	1	0	_aIntroduction to microelectronic fabrication / _cRichard C. Jaeger
250			_a2nd ed.
260			_aUpper Saddle River, N.J. : _bPrentice Hall, _c2002
300			_axiv, 316 p. : _bill. ; _c24 cm.
490	1		_aModular series on solid state devices ; _vv. 5
504			_aIncludes bibliographical references and index
650		0	_aIntegrated circuits _xVery large scale integration _xDesign and construction _vTextbooks
830		0	_aModular series on solid state devices (Upper Saddle River, N.J.) ; _vv. 5
907			_a.b13389920 _b2021-05-28 _c2019-11-12
942			_c01 _n0 _kTK7874.J33 2002
914			_avtls003290692
990			_ajj
991			_aProgram Fizik
991			_aFakulti Kejuruteraan dan Alam Bina
998			_al _b2004-07-06 _cm _da _feng _gxxu _y0 _z.b13389920
999			_c338317 _d338317