| 000 | 01279cam a2200337 a 4500 | ||
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| 005 | 20250930115655.0 | ||
| 008 | 040517s2002 xxka bi 001 0 eng | ||
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_a3527302573 _cRM241.20 |
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_a201311271721 _blan _c200407051322 _dhamka _c200407010826 _djamil _c200406231810 _djamil _y05-13-2004 _zzakir |
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| 040 | _dUKM | ||
| 090 | _aQC611.K673 3 | ||
| 090 |
_aQC611 _b.K673 |
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| 100 | 1 |
_aKorvink, J. G. _q(Jan G.). _954556 |
|
| 245 | 1 | 0 |
_aSemiconductors for micro and nanotechnology : _ban introduction for engineers / _cJan G. Korvink and Andreas Greiner. |
| 260 |
_aWeinheim : _bWiley-VCH, _c2002. |
||
| 300 |
_a340 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _vTextbooks. |
|
| 650 | 0 |
_aNanotechnology _xMathematics _vTextbooks. |
|
| 650 | 0 |
_aMicrotechnology _xMathematics _vTextbooks. |
|
| 700 | 1 | _aGreiner, Andreas. | |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/wiley031/2002512459.html. |
| 907 |
_a.b13375799 _b2021-05-28 _c2019-11-12 |
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_c01 _n0 _kQC611.K673 3 |
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| 914 | _avtls003289235 | ||
| 990 | _afa | ||
| 990 | _ajj | ||
| 991 | _aJabatan Kejuruteraan Mekanik & Bahan | ||
| 998 |
_al _a(2)t _b2004-01-05 _cm _da _feng _gxxk _y0 _z.b13375799 |
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