| 000 | 01274nam a2200313 a 4500 | ||
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| 005 | 20250930115350.0 | ||
| 008 | 040120s2002 ne a b 101 0 eng | ||
| 010 | _a2002-072962 | ||
| 020 |
_a1402005245 (alk. paper) _cRM627.12 |
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| 039 | 9 |
_a200402170857 _bhamudah _c200402161558 _dnuri _c200402111152 _dfarid _c200401201151 _dsanusi _y01-20-2004 _zsanusi |
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| 090 | _aTA418.9.T45C483 3 | ||
| 090 | _aTA418.9 | ||
| 245 | 0 | 0 |
_aChemical physics of thin film deposition processes for micro- and nano-technologies / _cedited by Yves Pauleau |
| 260 |
_aDordrecht : _bKluwer Academic Publishers, _c2002 |
||
| 300 |
_axiii, 363 p. : _bill. ; _c25 cm. |
||
| 440 | 0 |
_aNATO science series. _nSeries II, _pMathematics, physics, and chemistry ; _vv. 55 |
|
| 500 | _a'Published in cooperation with NATO Scientific Affairs Division.' | ||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aThin films _vCongresses |
|
| 650 | 0 |
_aNanotechnology _vCongresses |
|
| 700 | 1 |
_aPauleau, Yves _954294 |
|
| 907 |
_a.b13320026 _b2021-05-28 _c2019-11-12 |
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| 942 |
_c01 _n0 _kTA418.9.T45C483 3 |
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| 914 | _avtls000346886 | ||
| 990 | _afa | ||
| 991 | _aInstitut Kejuruteraan Mokro & Nanoelektronik | ||
| 998 |
_ad _b2004-07-01 _cm _da _feng _gne _y0 _z.b13320026 |
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| 999 |
_c331413 _d331413 |
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