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050 0 0 _aTK7876
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082 0 0 _a621.381/3
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100 1 _aSantos, Hector J. de los.
245 1 0 _aIntroduction to microelectromechanical (MEM) microwave systems /
_cHtor J. de los Santos.
246 3 0 _aMicroelectromechanical (MEM) microwave systems
260 _aBoston :
_bArtech House,
_cc1999.
300 _axiii, 217 p. :
_bill. ;
_c24 cm.
440 0 _aArtech House microwave library
440 0 _aMicroelectromechanical systems series
500 _aBahan out of print - tak minta dari PSPP sebab permintaan pelajar
504 _aIncludes bibliographical references and index.
650 0 _aMicrowave devices.
650 0 _aMicroelectromechanical systems.
907 _a.b13185445
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