| 000 | 01242cam a22003134a 4500 | ||
|---|---|---|---|
| 005 | 20250930114149.0 | ||
| 008 | 021001s2002 xxua b 001 0 eng | ||
| 020 |
_a0072393912 (alk. paper) _cRM448.47 |
||
| 039 | 9 |
_a201910311453 _bhayat _c200303281554 _dfarid _c200303281536 _dfarid _c200211061549 _dsanusi _y10-01-2002 _zsanusi |
|
| 090 | _aTK7874.H784 | ||
| 090 |
_aTK7874 _b.H784 |
||
| 100 | 1 | _aHsu, Tai-Ran. | |
| 245 | 1 | 0 |
_aMEMS and microsystems : _bdesign and manufacture / _cTai-Ran Hsu. |
| 260 |
_aBoston : _bMcGraw-Hill, _c2002. |
||
| 300 |
_axii, 436 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references (p. 427-431) and index. | ||
| 650 | 0 |
_aMicroelectronics. _960418 |
|
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 |
_aMicroelectronic packaging. _960415 |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/mh021/2001044737.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/mh021/2001044737.html |
| 907 |
_a.b13108918 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7874.H784 |
||
| 914 | _avtls000323718 | ||
| 990 | _afa | ||
| 991 | _aJabatan Kejuruteraan Kimia dan Proses | ||
| 998 |
_al _b2002-01-10 _cm _da _feng _gxxu _y0 _z.b13108918 |
||
| 999 |
_c310562 _d310562 |
||