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| 005 | 20250914124556.0 | ||
| 008 | 020930s2000 xxua b 001 0 eng | ||
| 020 |
_a0890065810 (alk. paper) _cRM421.08 |
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_a201910311526 _bhayat _c201408060919 _dlatihan _c201309141212 _dfati _c200211251546 _dfarid _y09-30-2002 _zsanusi |
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| 090 | _aTK7875.M383 | ||
| 090 |
_aTK7875 _b.M383 |
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| 100 | 1 | _aMaluf, Nadim. | |
| 245 | 1 | 3 |
_aAn introduction to microelectromechanical systems engineering / _cNadim Maluf. |
| 260 |
_aBoston : _bArtech House, _c2000. |
||
| 300 |
_axix, 265 p. : _bill. ; _c24 cm. |
||
| 440 | 0 | _aArtech House microelectromechanical systems library | |
| 504 | _aIncludes bibliographical references and index. | ||
| 526 | _aBuku bacaan asas fakulti. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 907 |
_a.b13108785 _b2021-05-28 _c2019-11-12 |
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| 942 |
_c01 _n0 _kTK7875.M383 |
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| 914 | _avtls000323704 | ||
| 990 | _afa | ||
| 991 | _aJabatan Kejuruteraan Mekanik dan Bahan | ||
| 998 |
_al _b2002-04-09 _cm _da _feng _gxxu _y0 _z.b13108785 |
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| 999 |
_c310549 _d310549 |
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