000 01078cam a2200289 a 4500
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008 020930s2000 xxua b 001 0 eng
020 _a0890065810 (alk. paper)
_cRM421.08
039 9 _a201910311526
_bhayat
_c201408060919
_dlatihan
_c201309141212
_dfati
_c200211251546
_dfarid
_y09-30-2002
_zsanusi
090 _aTK7875.M383
090 _aTK7875
_b.M383
100 1 _aMaluf, Nadim.
245 1 3 _aAn introduction to microelectromechanical systems engineering /
_cNadim Maluf.
260 _aBoston :
_bArtech House,
_c2000.
300 _axix, 265 p. :
_bill. ;
_c24 cm.
440 0 _aArtech House microelectromechanical systems library
504 _aIncludes bibliographical references and index.
526 _aBuku bacaan asas fakulti.
650 0 _aMicroelectromechanical systems.
907 _a.b13108785
_b2021-05-28
_c2019-11-12
942 _c01
_n0
_kTK7875.M383
914 _avtls000323704
990 _afa
991 _aJabatan Kejuruteraan Mekanik dan Bahan
998 _al
_b2002-04-09
_cm
_da
_feng
_gxxu
_y0
_z.b13108785
999 _c310549
_d310549