| 000 | 01082cam a22002894a 4500 | ||
|---|---|---|---|
| 005 | 20250914124437.0 | ||
| 008 | 020910s2001 xxua b 001 0 eng | ||
| 010 | _a00-057953 | ||
| 020 |
_a0849309166 (alk. paper) _cRM377.68 |
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| 039 | 9 |
_a200210071443 _bfarid _c200209121147 _dsanusi _y09-10-2002 _zsanusi |
|
| 090 | _aTK7875.L976 | ||
| 090 | _aTK7875 | ||
| 100 | 1 | _aLyshevski, Sergey Edward | |
| 245 | 1 | 0 |
_aNano- and microelectromechanical systems : _bfundamentals of nano- and microengineering / _cSergey Edward Lyshevski |
| 260 |
_aBoca Raton : _bCRC Press, _c2001 |
||
| 300 |
_a338 p. : _bill. ; _c24 cm. |
||
| 440 | 0 | _aNano- and microscience, engineering, technology, and medicine series | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 907 |
_a.b13094750 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7875.L976 |
||
| 914 | _avtls000322207 | ||
| 990 | _afa | ||
| 991 | _aJabatan Kejuruteraan Elektrik, Elektronik & Sistem | ||
| 998 |
_al _b2002-10-09 _cm _da _feng _gxxu _y0 _z.b13094750 |
||
| 999 |
_c309184 _d309184 |
||